recognized by CDE,medcine factories,test organizations.
- Product Features
- Product parameter
- Sample Video
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Characteristic
1. High power and high stability UV laser directly ablates materials by vaporizing, μm heat affected zone and minimum 5μm processing spot.
2. The high-speed and high-precision galvanometer is used to control the beam deviation, and the small format high-speed precision etching is realized.
3. Through the high-precision translation table, the system realizes the precise positioning.
4. The z-axis is electrically adjustable and can be precisely focused to meet the processing requirements of different thickness materials.
5. The system has a high-resolution industrial camera to ensure long-term stability and accuracy of the system.
6. The system adopts marble table to improve the comprehensive stability of the system. Mechanical parts are carefully selected to ensure long-term accuracy.
7. The system can be used to process metals, ceramics, organics, glass and other materials.
8. Minimum machining line width<5μm.
Category |
Parameter |
FM-UVD5 |
FM-UVSD5 |
FM-UVPD12 |
Laser |
Wavelength |
355nm |
355nm |
355nm |
Power |
5W@30kHz |
5W@30kHz |
12W@100kHz |
|
Modulation frequency |
1~200kHz |
1~200kHz |
1~2000kHz |
|
Pulse width |
20ns@30kHz |
20ns@30kHz |
7ps@100kHz |
|
Beam quality M2 |
<1.3 |
<1.3 |
<1.3 |
|
Galvanometer |
Scanning range |
<50*50mm |
<50*50mm |
<50*50mm |
Repeatability accuracy |
<1μm |
<1μm |
<1μm |
|
Scanning speed |
≤3m/s |
≤3m/s |
≤3m/s |
|
Positioning speed |
≤6m/s |
≤6m/s |
≤6m/s |
|
XY translation table |
Trip |
None |
300*300mm |
300*300mm |
Repeatability accuracy |
None |
≤±5μm |
≤±1μm |
|
positioning accuracy |
None |
≤±25μm |
≤±3μm |
|
Z axis |
Trip |
50mm |
50mm |
50mm |
Repeatability accuracy |
≤±3μm |
≤±3μm |
≤±3μm |
|
positioning accuracy |
≤±15μm |
≤±15μm |
≤±15μm |
|
CCD Monitoring |
Pixel |
5 mega |
5 mega |
5 mega |
Optical magnification |
8X |
8X |
8X |
|
Processing capacity |
Minimum spot |
5μm |
5μm |
5μm |
Micro hole machining accuracy |
±5μm |
±5μm |
±5μm |
|
Repeatability accuracy |
≤±2μm |
≤±2μm |
≤±2μm |
|
Processing materials |
Glass, metal, organic matter, etc |
|||
Drilling performance |
Tube-type bottle |
good |
excellent |
excellent |
Moulded bottle |
good |
excellent |
excellent |
|
Plastic bottle |
commonly |
good |
excellent |
|
Soft bag |
inappropriate |
good |
excellent |
|
Cooling |
Water cooling (1500W cooling capacity) |
|||
Power |
220V 50~60Hz |
|||
power waste |
≤3000W |
|||
Size |
1500*1000*1800mm |
1600*1300*1800mm |
||
weight |
1500Kg |
2000Kg |
Samples
1μm sample test report.