laser Drilling and micro machining system -CCIT positive sample
recognized by CDE,medcine factories,test organizations.
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Characteristic

1.     High power and high stability UV laser directly ablates materials by vaporizing, μm heat affected zone and minimum 5μm processing spot.

2.     The high-speed and high-precision galvanometer is used to control the beam deviation, and the small format high-speed precision etching is realized.

3.     Through the high-precision translation table, the system realizes the precise positioning.

4.     The z-axis is electrically adjustable and can be precisely focused to meet the processing requirements of different thickness materials.

5.     The system has a high-resolution industrial camera to ensure long-term stability and accuracy of the system.

6.     The system adopts marble table to improve the comprehensive stability of the system. Mechanical parts are carefully selected to ensure long-term accuracy.

7.     The system can be used to process metals, ceramics, organics, glass and other materials.

8.     Minimum machining line width<5μm.


Category

Parameter

FM-UVD5

FM-UVSD5

FM-UVPD12

   

Laser

Wavelength

355nm

355nm

355nm

Power

5W@30kHz

5W@30kHz

12W@100kHz

Modulation frequency

1~200kHz

1~200kHz

1~2000kHz

Pulse width

20ns@30kHz

20ns@30kHz

7ps@100kHz

Beam quality M2

1.3

1.3

1.3

Galvanometer

Scanning range

50*50mm

50*50mm

50*50mm

Repeatability accuracy

1μm

1μm

1μm

Scanning speed

3m/s

3m/s

3m/s

Positioning speed

6m/s

6m/s

6m/s

XY translation table

Trip

None

300*300mm

300*300mm

Repeatability accuracy

None

≤±5μm

≤±1μm

positioning accuracy

None

≤±25μm

≤±3μm

Z axis

Trip

50mm

50mm

50mm

Repeatability accuracy

≤±3μm

≤±3μm

≤±3μm

positioning accuracy

≤±15μm

≤±15μm

≤±15μm

  CCD Monitoring

Pixel

5 mega

5 mega

5 mega

Optical magnification

8X

8X

8X

Processing capacity

Minimum spot

5μm

5μm

5μm

Micro hole machining accuracy

±5μm

±5μm

±5μm

Repeatability accuracy

≤±2μm

≤±2μm

≤±2μm

Processing materials

Glass, metal, organic matter, etc

Drilling performance

Tube-type bottle

good

excellent

excellent

Moulded bottle

good

excellent

excellent

Plastic bottle

commonly

good

excellent

Soft bag

inappropriate

good

excellent

Cooling

Water cooling (1500W cooling capacity)

Power

220V 50~60Hz

power waste

3000W

Size

1500*1000*1800mm

1600*1300*1800mm

weight

1500Kg

2000Kg

Samples

1μm sample test report.

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